Nanostructured Materials Production by Hypersonic Plasma Particle Deposition
نویسندگان
چکیده
We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (ItPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented. © 1997 Acta Metallurgica Inc.
منابع مشابه
Pii: S0021-8502(97)10015-5
A new process for the production of nanostructured materials, hypersonic plasma particle deposition (HPPD), is experimentally investigated. In HPPD, vapor phase precursors are injected into a flowing plasma generated by a DC arc. The plasma undergoes a supersonic expansion into a deposition chamber, with the pressure dropping across the nozzle from &500 Torr to &2 Torr. Ultrafine particles nucl...
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